PhD – Optomechanics of MEMS sensors for high performance applications: towards ultra high-speed atomic force microscopy
phenomena as well as from technological applications in the field of ultra-sensitive measurements. In particular during the last decade, the convergence between these concepts and fabrication techniques derived from semiconductors  and MEMS/NEMS has yielded simpler device structures and experimental environments. This fast growing research activity opens new perspectives and is undoubtedly a promising scientific route that will have a great impact for sensing applications, e.g. mass sensors for biological or chemical detection, inertial sensors (gyroscopes, accelerometers), force sensors (magnetic, mechanical stress…) [4, 5, 6].
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